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Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
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1990 since deposited on 2021-10-16
2last month
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Acq. date: 2026-01-06
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Views
1990 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-06
Citations