Publication:
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1991 since deposited on 2021-10-16
Acq. date: 2026-02-25
Citations
Statistics
Views
1991 since deposited on 2021-10-16
Acq. date: 2026-02-25
Citations