Publication:
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
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1991 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-26
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Statistics
Views
1991 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-26
Citations