Publication:

Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

Date

Loading...
Thumbnail Image

Abstract

Description

Metrics

Views

1986 since deposited on 2021-10-16
Acq. date: 2025-10-23

Citations

Metrics

Views

1986 since deposited on 2021-10-16
Acq. date: 2025-10-23

Citations