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Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Publication:
Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency
Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rooyackers, Rita
;
Augendre, Emmanuel
;
Degroote, Bart
;
Collaert, Nadine
;
Nackaerts, Axel
;
Dixit, Abhisek
;
Vandeweyer, Tom
;
Pawlak, Bartek
;
Ercken, Monique
;
Kunnen, Eddy
;
Dilliway, Gabriela
;
Leys, Frederik
;
Loo, Roger
;
Jurczak, Gosia
;
Biesemans, Serge
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1986
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1986
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations