Publication:

Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT

Date

2007

Proceedings Paper

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Author(s)

Rothschild, Aude

;

;

Everaert, Jean-Luc

;

Kerner, Christoph

;

Chiarella, Thomas

;

Hoffmann, Thomas

;

Vrancken, Christa

;

Shickova, Adelina

;

;

Mitsuhashi, Riichirou

;

;

;

Veloso, Anabela

;

;

Absil, Philippe

;

Biesemans, Serge

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Acq. date: 2026-04-26