dc.contributor.author | Rothschild, Aude | |
dc.contributor.author | Shi, Xiaoping | |
dc.contributor.author | Everaert, Jean-Luc | |
dc.contributor.author | Kerner, Christoph | |
dc.contributor.author | Chiarella, Thomas | |
dc.contributor.author | Hoffmann, Thomas | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Shickova, Adelina | |
dc.contributor.author | Yoshinao, H. | |
dc.contributor.author | Mitsuhashi, Riichirou | |
dc.contributor.author | Niwa, Masaaki | |
dc.contributor.author | Lauwers, Anne | |
dc.contributor.author | Veloso, Anabela | |
dc.contributor.author | Kittl, Jorge | |
dc.contributor.author | Absil, Philippe | |
dc.contributor.author | Biesemans, Serge | |
dc.date.accessioned | 2021-10-16T19:12:02Z | |
dc.date.available | 2021-10-16T19:12:02Z | |
dc.date.issued | 2007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12808 | |
dc.source | IIOimport | |
dc.title | Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Everaert, Jean-Luc | |
dc.contributor.imecauthor | Kerner, Christoph | |
dc.contributor.imecauthor | Chiarella, Thomas | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Lauwers, Anne | |
dc.contributor.imecauthor | Veloso, Anabela | |
dc.contributor.imecauthor | Absil, Philippe | |
dc.contributor.imecauthor | Biesemans, Serge | |
dc.contributor.orcidimec | Chiarella, Thomas::0000-0002-6155-9030 | |
dc.source.peerreview | no | |
dc.source.beginpage | 198 | |
dc.source.endpage | 199 | |
dc.source.conference | Symposium on VLSI Technology. Digest of Technical Papers | |
dc.source.conferencedate | 14/06/2007 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec | |