Show simple item record

Achieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT

dc.contributor.authorRothschild, Aude
dc.contributor.authorShi, Xiaoping
dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorKerner, Christoph
dc.contributor.authorChiarella, Thomas
dc.contributor.authorHoffmann, Thomas
dc.contributor.authorVrancken, Christa
dc.contributor.authorShickova, Adelina
dc.contributor.authorYoshinao, H.
dc.contributor.authorMitsuhashi, Riichirou
dc.contributor.authorNiwa, Masaaki
dc.contributor.authorLauwers, Anne
dc.contributor.authorVeloso, Anabela
dc.contributor.authorKittl, Jorge
dc.contributor.authorAbsil, Philippe
dc.contributor.authorBiesemans, Serge
dc.date.accessioned2021-10-16T19:12:02Z
dc.date.available2021-10-16T19:12:02Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12808
dc.sourceIIOimport
dc.titleAchieving 9ps unloaded ring oscillator delay in FuSI/HfSiON with 0.8 nm EOT
dc.typeProceedings paper
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorKerner, Christoph
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorAbsil, Philippe
dc.contributor.imecauthorBiesemans, Serge
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.source.peerreviewno
dc.source.beginpage198
dc.source.endpage199
dc.source.conferenceSymposium on VLSI Technology. Digest of Technical Papers
dc.source.conferencedate14/06/2007
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record