Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN

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Authors

San Andres Serrano, Enrique; Pantisano, Luigi; Severi, Simone; Trojman, Lionel; Ferain, Isabelle; Toledano-Luque, M.; Jurczak, Gosia; Groeseneken, Guido; De Gendt, Stefan; Heyns, Marc

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Mobility extraction using RFCV for 80nm MOSFET with 1nm EOT HfSiON/TiN

Publication type

Journal article

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