Formation of germanium shallow junction by flash annealing

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Authors

Satta, Alessandra; D'Amore, Antonio; Simoen, Eddy; Anwand, W; Skorupa, W; Clarysse, Trudo; Van Daele, Benny; Janssens, Tom

Issue

1_2

Journal

Nuclear Instruments and Methods B

Volume

257

Title

Formation of germanium shallow junction by flash annealing

Publication type

Journal article

Embargo date

9999-12-31

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