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Formation of germanium shallow junction by flash annealing
Publication:
Formation of germanium shallow junction by flash annealing
Date
2007
Journal article
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12954.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Satta, Alessandra
;
D'Amore, Antonio
;
Simoen, Eddy
;
Anwand, W
;
Skorupa, W
;
Clarysse, Trudo
;
Van Daele, Benny
;
Janssens, Tom
Journal
Nuclear Instruments and Methods B
Abstract
Description
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Views
1993
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1993
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations