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Deposited silicon-on-insulation material technology for photonic integrated circuitry

dc.contributor.authorSelvaraja, Shankar
dc.contributor.authorBogaerts, Wim
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorBaets, Roel
dc.contributor.authorSleeckx, Erik
dc.contributor.authorSchaekers, Marc
dc.date.accessioned2021-10-16T19:34:39Z
dc.date.available2021-10-16T19:34:39Z
dc.date.issued2007-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12874
dc.sourceIIOimport
dc.titleDeposited silicon-on-insulation material technology for photonic integrated circuitry
dc.typeProceedings paper
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorBaets, Roel
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage15
dc.source.endpage18
dc.source.conferenceProceedings 12th Annual Symposium of the IEEE/LEOS Benelux Chapter
dc.source.conferencedate17/12/2007
dc.source.conferencelocationBrussels Belgium
imec.availabilityPublished - open access


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