Publication:

Silicon nanophotonic wire structures fabricated by 193nm optical lithography

Date

2007-10

Proceedings Paper

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Files

15672.pdf 664.57 KB

Author(s)

Selvaraja, Shankar

;

Jaenen, Patrick

;

;

;

;

Van Thourhout, Dries

;

Metrics

1794 since deposited on 2021-10-16

Acq. date: 2025-12-16