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NBTI reliability of Ni FUSI/HfSiON gates: effect of silicide phase

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1895 since deposited on 2021-10-16
2last month
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Acq. date: 2026-01-08

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1895 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-08

Citations