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Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Publication:
Germanium content dependence of the leakage current of recessed SiGe source/drain junctions
Date
2007
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Bargallo Gonzalez, Mireia
;
Eneman, Geert
;
Verheyen, Peter
;
Benedetti, Alessandro
;
Bender, Hugo
;
Loo, Roger
;
Claeys, Cor
Journal
Journal of Materials Science: Materials in Electronics
Abstract
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1980
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1980
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations