Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

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Authors

Simoen, Eddy; Bargallo Gonzalez, Mireia; Eneman, Geert; Verheyen, Peter; Benedetti, Alessandro; Bender, Hugo; Loo, Roger; Claeys, Cor

Issue

7

Journal

Journal of Materials Science: Materials in Electronics

Volume

18

Title

Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

Publication type

Journal article

Embargo date

9999-12-31

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