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Effective work-function modulation by aluminum-ion implantation for metal-gate technology (poly-Si/TiN/SiO2)
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1910 since deposited on 2021-10-16
3last month
Acq. date: 2026-01-08
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Views
1910 since deposited on 2021-10-16
3last month
Acq. date: 2026-01-08
Citations