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Removal of organic contamination from silicon surfaces

dc.contributor.authorKenens, Conny
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorKnotter, D. M.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-29T14:38:06Z
dc.date.available2021-09-29T14:38:06Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1291
dc.sourceIIOimport
dc.titleRemoval of organic contamination from silicon surfaces
dc.typeProceedings paper
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage107
dc.source.endpage110
dc.source.conferenceProceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate23/09/1996
dc.source.conferencelocationAntwerpen Belgium
imec.availabilityPublished - open access


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