Authors

Sonde, Sushant; Simoen, Eddy; Claeys, Cor; Satta, Alessandra; De Jaeger, Brice; Nicholas, Gareth; Meuris, Marc

Conference

Advanced Gate Stack, Source/Drain and Channel Engineering for Si-based CMOS 3: New Materials, Processes and Equipment

Title

Origin and suppression of junction leakage in germanium-on-silicon structures

Publication type

Proceedings paper

Embargo date

9999-12-31