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High Ge content SGOI substrates obtained by the Ge condensation technique:a template for growth of strained epitaxial Ge
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Authors
Souriau, Laurent
;
Terzieva, Valentina
;
Vandervorst, Wilfried
;
Clemente, Francesca
;
Brijs, Bert
;
Moussa, Alain
;
Caymax, Matty
;
Loo, Roger
;
Meuris, Marc
Conference
5th International Conference on Silicon Epitaxy and Heterostructures - ICSI-5
Title
High Ge content SGOI substrates obtained by the Ge condensation technique:a template for growth of strained epitaxial Ge
Publication type
Proceedings paper
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