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Stepper lithography on large-topography microstructures for thermoelectric energy scavengers

dc.contributor.authorSu, Jiale
dc.contributor.authorVullers, Ruud
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorvan Andel, Yvonne
dc.contributor.authorPellens, Rudy
dc.contributor.authorGui, C.Q.
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorWang, Ziyang
dc.date.accessioned2021-10-16T20:04:14Z
dc.date.available2021-10-16T20:04:14Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12958
dc.sourceIIOimport
dc.titleStepper lithography on large-topography microstructures for thermoelectric energy scavengers
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage153
dc.source.endpage156
dc.source.conferencePowerMEMS. The 7th Int. Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
dc.source.conferencedate28/11/2007
dc.source.conferencelocationFreiburg Germany
imec.availabilityPublished - open access


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