Authors

Terzieva, Valentina; Souriau, Laurent; Caymax, Matty; Brunco, David; Moussa, Alain; Van Elshocht, Sven; Loo, Roger; Meuris, Marc

Conference

5th International Conference on Silicon Epitaxy and Heterostructures - ICSI-5

Title

Benefits and side effects of high temperature anneal used to reduce threading dislocation defects in epitaxial Ge layers on Si substrates

Publication type

Oral presentation

Embargo date

9999-12-31