Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection

Metadata

Show full item record

Authors

Toledano-Luque, M.; Pantisano, Luigi; Degraeve, Robin; Zahid, Mohammed; Ferain, Isabelle; San Andres Serrano, Enrique; Groeseneken, Guido; De Gendt, Stefan

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Charge pumping spectroscopy: HfSiON defect study after substrate hot electron injection

Publication type

Journal article

Collections

Articles