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Grown-in defect density spectra in czochralski silicon wafers

dc.contributor.authorKissinger, G.
dc.contributor.authorGräf, D.
dc.contributor.authorLambert, U.
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorRichter, H.
dc.date.accessioned2021-09-29T14:39:06Z
dc.date.available2021-09-29T14:39:06Z
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1298
dc.sourceIIOimport
dc.titleGrown-in defect density spectra in czochralski silicon wafers
dc.typeOral presentation
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conference2nd International Symposium on Advanced Science and Technology of Silicon Materials
dc.source.conferencedate25/11/1996
dc.source.conferencelocationKona, HI USA
imec.availabilityPublished - open access


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