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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves

dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorMeshman, Boris
dc.contributor.authorSchneider, Dieter
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-16T20:22:12Z
dc.date.available2021-10-16T20:22:12Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13006
dc.sourceIIOimport
dc.titleStiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.conference4th International Conference on Spectroscopic Ellipsometry
dc.source.conferencedate11/06/2007
dc.source.conferencelocationStockholm Sweden
imec.availabilityPublished - imec


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