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Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
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1871 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
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Metrics
Views
1871 since deposited on 2021-10-16
2last month
Acq. date: 2026-01-09
Citations