Publication:
Stiffening and hydrophilisation of SOG low-k material studied by ellipsometric porosimetry, UV ellipsometry and laser-induced surface acoustic waves
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1873 since deposited on 2021-10-16
2last month
Acq. date: 2026-04-27
Citations
Statistics
Views
1873 since deposited on 2021-10-16
2last month
Acq. date: 2026-04-27
Citations