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Work function (WF) simulations of Ta/HfO2, Ta2C/HfO2 and Ta2C/La2O3/HfO2 capped high-k stacks
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1929 since deposited on 2021-10-16
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Acq. date: 2026-01-26
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1929 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-01-26
Citations