Publication:

Thermal stability of rare earth oxides as high-k gate dielectrics

Date

2007

Proceedings Paper

Simple item page Full metadata Statistics

Files

15428.pdf 347 KB

Author(s)

Van Elshocht, Sven

;

Adelmann, Christoph

;

Conard, Thierry

;

Delabie, Annelies

;

Franquet, Alexis

;

;

;

Richard, Olivier

;

;

De Gendt, Stefan

Metrics

1839 since deposited on 2021-10-16

Acq. date: 2025-12-16