Publication:

Thermal stability of rare earth oxides as high-k gate dielectrics

Date

2007

Proceedings Paper

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Files

15428.pdf 347 KB

Author(s)

Van Elshocht, Sven

;

Adelmann, Christoph

;

Conard, Thierry

;

Delabie, Annelies

;

Franquet, Alexis

;

;

;

Richard, Olivier

;

;

De Gendt, Stefan

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Acq. date: 2026-04-25