Emissivity independent heating of 3D patterns

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Authors
Vanormelingen, Koen; Granneman, Ernst; Terhorst, Huub; Rosseel, Erik; Verheyden, Kurt
Conference
Extended Abstracts of the 7th International Workshop on Junction Technology - IWJT
Title
Emissivity independent heating of 3D patterns
Publication type
Proceedings paper
Embargo date
9999-12-31
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