Show simple item record

Emissivity independent heating of 3D patterns

dc.contributor.authorVanormelingen, Koen
dc.contributor.authorGranneman, Ernst
dc.contributor.authorTerhorst, Huub
dc.contributor.authorRosseel, Erik
dc.contributor.authorVerheyden, Kurt
dc.date.accessioned2021-10-16T21:11:01Z
dc.date.available2021-10-16T21:11:01Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13142
dc.sourceIIOimport
dc.titleEmissivity independent heating of 3D patterns
dc.typeProceedings paper
dc.contributor.imecauthorRosseel, Erik
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage141
dc.source.endpage142
dc.source.conferenceExtended Abstracts of the 7th International Workshop on Junction Technology - IWJT
dc.source.conferencedate8/06/2007
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
15767.pdf
Size:
599.9Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record