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High sputter bias super secondary grain initiation (in structures)
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Authors
Vanstreels, Kris
;
Brongersma, Sywert
;
D'Haen, Jan
;
Demuynck, Steven
;
De Ceuninck, Ward
;
Caluwaerts, Rudy
;
D'Olieslaeger, Marc
Conference
Advanced Metallization Conference 2006 - AMC 2006
Title
High sputter bias super secondary grain initiation (in structures)
Publication type
Proceedings paper
Embargo date
9999-12-31
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