Show simple item record

High sputter bias super secondary grain initiation (in structures)

dc.contributor.authorVanstreels, Kris
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorD'Haen, Jan
dc.contributor.authorDemuynck, Steven
dc.contributor.authorDe Ceuninck, Ward
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorD'Olieslaeger, Marc
dc.date.accessioned2021-10-16T21:11:44Z
dc.date.available2021-10-16T21:11:44Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13144
dc.sourceIIOimport
dc.titleHigh sputter bias super secondary grain initiation (in structures)
dc.typeProceedings paper
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorD'Haen, Jan
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorDe Ceuninck, Ward
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage97
dc.source.endpage103
dc.source.conferenceAdvanced Metallization Conference 2006 - AMC 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XXII


Files in this item

Thumbnail
Name:
15979.pdf
Size:
2.070Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record