Reliability degradation of HfSiO gate dielectric layers: influence of nitridation

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Authors

Vellianitis, G.; Petry, Jasmine; Hooker, Jacob; Delabie, Annelies; De Gendt, Stefan

Issue

9_10

Journal

Microelectronic Engineering

Volume

84

Title

Reliability degradation of HfSiO gate dielectric layers: influence of nitridation

Publication type

Journal article

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