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Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials

dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorKaneko, Shinya
dc.contributor.authorTsuji, Naoto
dc.contributor.authorMatsushita, Kiyohiro
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBeyer, Gerald
dc.date.accessioned2021-10-16T21:21:52Z
dc.date.available2021-10-16T21:21:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13169
dc.sourceIIOimport
dc.titleDeposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
dc.typeProceedings paper
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.source.peerreviewno
dc.source.conference16th European Conference on Chemical Vapor Deposition - EUROCVD
dc.source.conferencedate16/09/2007
dc.source.conferencelocationScheveningen The Netherlands
imec.availabilityPublished - imec


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