Publication:
Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
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1932 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-26
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Statistics
Views
1932 since deposited on 2021-10-16
1last month
Acq. date: 2026-02-26
Citations