Publication:
Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
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1925 since deposited on 2021-10-16
1last week
Acq. date: 2025-10-29
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Metrics
Views
1925 since deposited on 2021-10-16
1last week
Acq. date: 2025-10-29
Citations