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Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials

Date

2007
Proceedings Paper
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dc.contributor.authorVerdonck, Patrick
dc.contributor.authorDe Roest, David
dc.contributor.authorKaneko, Shinya
dc.contributor.authorTsuji, Naoto
dc.contributor.authorMatsushita, Kiyohiro
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBeyer, Gerald
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-16T21:21:52Z
dc.date.available2021-10-16T21:21:52Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13169
dc.source.conference16th European Conference on Chemical Vapor Deposition - EUROCVD
dc.source.conferencedate16/09/2007
dc.source.conferencelocationScheveningen The Netherlands
dc.title

Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials

dc.typeProceedings paper
dspace.entity.typePublication
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