Publication:
Deposition and characterization of porogen based PECVD deposited and UV-cured extreme low-k materials
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1924 since deposited on 2021-10-16
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Acq. date: 2025-10-24
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Views
1924 since deposited on 2021-10-16
447item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations