Show simple item record

Thin film characterization of PEALD Ru layers on an ALD WNC substrate

dc.contributor.authorVolders, Henny
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSinapi, Fabrice
dc.contributor.authorBender, Hugo
dc.contributor.authorBenedetti, Alessandro
dc.contributor.authorBrijs, Bert
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorSteenbergen, Johnny
dc.contributor.authorTravaly, Youssef
dc.contributor.authorSprey, Hessel
dc.contributor.authorLi, Wei-Min
dc.contributor.authorShimizu, Akira
dc.contributor.authorPark, Hyung Sang
dc.date.accessioned2021-10-16T21:32:14Z
dc.date.available2021-10-16T21:32:14Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13196
dc.sourceIIOimport
dc.titleThin film characterization of PEALD Ru layers on an ALD WNC substrate
dc.typeProceedings paper
dc.contributor.imecauthorVolders, Henny
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorSteenbergen, Johnny
dc.contributor.imecauthorSprey, Hessel
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage227
dc.source.endpage232
dc.source.conferenceAdvanced Metallization Conference 2006 - AMC 2006
dc.source.conferencedate17/10/2006
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access
imec.internalnotesConference Proceedings AMC XXII


Files in this item

Thumbnail
Name:
15040.pdf
Size:
974.3Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record