Publication:

A novel concept for contact etch residue removal

Date

2007

Proceedings Paper

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Files

15534.pdf 1004.82 KB

Author(s)

;

;

Demuynck, Steven

;

Richard, Olivier

;

Conard, Thierry

;

Vertommen, Johan

;

Boullart, Werner

Statistics

2011 since deposited on 2021-10-16

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Acq. date: 2026-09-10