Publication:
The potential of double patterning immersion lithography for the 32nm half pitch node
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1859 since deposited on 2021-10-16
3last month
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Acq. date: 2026-10-07
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Statistics
Views
1859 since deposited on 2021-10-16
3last month
2last week
Acq. date: 2026-10-07
Citations