Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases

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Authors
Yu, HongYu; Chang, Shou-Zen; Veloso, Anabela; Lauwers, Anne; Adelmann, Christoph; Onsia, Bart; Van Elshocht, Sven; Singanamalla, Raghunath; Demand, Marc; Vos, Rita; Kauerauf, Thomas; Brus, Stephan; Shi, Xiaoping; Kubicek, Stefan; Vrancken, Christa; Mitsuhashi, Riichirou; Lehnen, Peer; Kittl, Jorge; Niwa, M.; Yin, K.M.; Hoffmann, Thomas; De Gendt, Stefan; Jurczak, Gosia; Absil, Philippe; Biesemans, Serge
Conference
Symposium on VLSI Technology. Digest of Technical Papers
Title
Low Vt Ni-FUSI CMOS technology using a DyO cap layer with either single or dual Ni-phases
Publication type
Proceedings paper
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