Electrical properties of n-MOSFETs using the NiSi:Yb FUSI electrode

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Authors

Yu, HongYu; Lauwers, Anne; Demeurisse, Caroline; Richard, Olivier; Mertens, Sofie; Opsomer, Karl; Singanamalla, Raghunath; Rosseel, Erik; Absil, Philippe; Biesemans, Serge

Issue

2

Journal

IEEE Electron Device Letters

Volume

28

Title

Electrical properties of n-MOSFETs using the NiSi:Yb FUSI electrode

Publication type

Journal article

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