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Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions
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Authors
Abu Jeriban, Salima
;
Guiot, Y.
;
Bacherius, L.
;
Proost, J.
;
Sleeckx, Erik
;
Vos, Rita
;
Mertens, Paul
Conference
Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS
Title
Effect of dopants on the dissolution behavior of silicon substrates in HF-based cleaning solutions
Publication type
Proceedings paper
Embargo date
9999-12-31
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