Publication:

Thermally-stable high effective work function TaCN and Ta2N films for pMOS metal gate applications

Date

2008
Proceedings Paper
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Author(s)

Adelmann, Christoph  
;
Lehnen, Peer
;
Ragnarsson, Lars-Ake  
;
Conard, Thierry  
;
Franquet, Alexis  
;
Chang, Vincent
;
Rohr, Erika
;
Meersschaut, Johan  
;
Boissiere, Olivier
;
Lohe, Christoph
;
Schram, Tom  
;
Van Elshocht, Sven  
;
De Gendt, Stefan  

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