Authors

Adelmann, Christoph; Lehnen, Peer; Ragnarsson, Lars-Ake; Conard, Thierry; Franquet, Alexis; Chang, Vincent; Rohr, Erika; Meersschaut, Johan; Boissiere, Olivier; Lohe, Christoph; Schram, Tom; Van Elshocht, Sven; De Gendt, Stefan

Conference

Materials Science of High-k Dielectric Stacks - From Fundamentals to Technology

Title

Thermally-stable high effective work function TaCN and Ta2N films for pMOS metal gate applications

Publication type

Proceedings paper