Publication:
Thermally-stable high effective work function TaCN and Ta2N films for pMOS metal gate applications
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1878 since deposited on 2021-10-17
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Acq. date: 2025-10-25
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Metrics
Views
1878 since deposited on 2021-10-17
414item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations