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Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment

dc.contributor.authorAguilera, Lidia
dc.contributor.authorPolspoel, Wouter
dc.contributor.authorPorti, Marc
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorNafria, Montserrat
dc.contributor.authorAymerich, Xavier
dc.date.accessioned2021-10-17T06:13:31Z
dc.date.available2021-10-17T06:13:31Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13294
dc.sourceIIOimport
dc.titleNanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage657
dc.source.endpage658
dc.source.conferenceIEEE International Reliability Physics Symposium Proceedings - IRPS
dc.source.conferencedate27/04/2008
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - imec


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