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Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics
Publication:
Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics
Date
2008
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Aguilera, Lidia
;
Polspoel, Wouter
;
Volodin, Alexander
;
Van Haesendonck, Chris
;
Porti, Marc
;
Vandervorst, Wilfried
;
Nafria, Montserrat
;
Aymerich, Xavier
Journal
Journal of Vacuum Science and Technology B
Abstract
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1944
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations
Metrics
Views
1944
since deposited on 2021-10-17
Acq. date: 2025-10-24
Citations