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Impact of nitridation on recoverable and permanent NBTI degradation in high-k/metal-gate pMOSFETs
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Authors
Aoulaiche, Marc
;
Kaczer, Ben
;
Roussel, Philippe
;
Houssa, Michel
;
De Gendt, Stefan
;
Maes, Herman
;
Groeseneken, Guido
Conference
15th Workshop on Dielectrics in Microelectronics - WoDiM
Title
Impact of nitridation on recoverable and permanent NBTI degradation in high-k/metal-gate pMOSFETs
Publication type
Oral presentation
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