Authors

Bargallo Gonzalez, Mireia; Simoen, Eddy; Vissouvanadin, B.; Verheyen, Peter; Loo, Roger; Claeys, Cor

Conference

International Conference on Extended Defects in Semiconductors - EDS

Title

Influence of the strain-relaxation induced defect creation on the leakage current of embedded Si1-xGex source/drain junctions

Publication type

Oral presentation