Authors

Bryce, George; Severi, Simone; Du Bois, Bert; Willegems, Myriam; Claes, Gert; Van Hoof, Rita; Haspeslagh, Luc; Decoutere, Stefaan; Witvrouw, Ann

Conference

SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices

Title

Simultaneous optimization of the material properties, uniformity and deposition rate of polycrystalline CVD And PECVD silicon-germanium layers for MEMS applications

Publication type

Proceedings paper