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Effect of top dielectric morphology and gate material on the performance of nitride-based FLASH memory cells
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Authors
Cacciato, Antonio
;
Breuil, Laurent
;
Van den Bosch, Geert
;
Richard, Olivier
;
Rothschild, Aude
;
Furnemont, Arnaud
;
Bender, Hugo
;
Kittl, Jorge
;
Van Houdt, Jan
Conference
Materials Science and Technology for Nonvolatile Memories
Title
Effect of top dielectric morphology and gate material on the performance of nitride-based FLASH memory cells
Publication type
Proceedings paper
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