Publication:
Implementation of Ru based barriers in 50 nm half pitch single damascene Cu/SiCOH (k=2.5) structures
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1919 since deposited on 2021-10-17
3last month
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Acq. date: 2025-12-09
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Views
1919 since deposited on 2021-10-17
3last month
2last week
Acq. date: 2025-12-09
Citations