Authors

Chandra, A.; Bastawros, A. F.; Biswas, R.; Sherman, P. J.; Armini, Silvia

Conference

Proceedings 13th Int. Conference on Chemical-Mechanical Polish (CMP) Planarization for ULSI Multilevel Interconnection - CMP-MIC

Title

Defectivity in chemical mechanical planarization: A multiscale approach

Publication type

Proceedings paper