Publication:
The evaluation and the inegration of low-k organic spin-on materials in a non-etchback interconnect process
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1997 since deposited on 2021-09-29
3last month
Acq. date: 2026-04-05
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Statistics
Views
1997 since deposited on 2021-09-29
3last month
Acq. date: 2026-04-05
Citations