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Integration of carbon nanotubes for advanced interconnects

dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorEsconjauregui, Santiago Cruz
dc.contributor.authorRomo Negreira, Ainhoa
dc.contributor.authorCott, Daire
dc.contributor.authorEk Weis, Johan
dc.contributor.authorRichard, Olivier
dc.contributor.authorWhelan, Caroline
dc.contributor.authorHantschel, Thomas
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVereecken, Philippe
dc.date.accessioned2021-10-17T06:31:39Z
dc.date.available2021-10-17T06:31:39Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13518
dc.sourceIIOimport
dc.titleIntegration of carbon nanotubes for advanced interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorRomo Negreira, Ainhoa
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting Symposium J: Beyond Silicon Technology: Materials and Devices for Post -Si CMOS
dc.source.conferencedate26/05/2008
dc.source.conferencelocationStrasburg France
dc.identifier.urlhttp://www.emrs-strasbourg.com/files/pdf/2008%20SPRING/symposium_j.pdf
imec.availabilityPublished - imec


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