dc.contributor.author | Meynen, Herman | |
dc.contributor.author | Waeterloos, Joost | |
dc.contributor.author | Coenegrachts, Bart | |
dc.contributor.author | Gao, Teng | |
dc.contributor.author | Grillaert, Joost | |
dc.contributor.author | Van den hove, Luc | |
dc.date.accessioned | 2021-09-29T15:13:39Z | |
dc.date.available | 2021-09-29T15:13:39Z | |
dc.date.issued | 1996 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/1351 | |
dc.source | IIOimport | |
dc.title | The evaluation and the inegration of low-k organic spin-on materials in a non-etchback interconnect process | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Coenegrachts, Bart | |
dc.contributor.imecauthor | Van den hove, Luc | |
dc.source.peerreview | no | |
dc.source.conference | PLANAR 96; June 17, 1996; Santa Clara, Calif., USA. | |
dc.source.conferencelocation | | |
imec.availability | Published - imec | |