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Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer

dc.contributor.authorClaes, Gert
dc.contributor.authorVan Barel, Greg
dc.contributor.authorVan Hoof, Rita
dc.contributor.authorDu Bois, Bert
dc.contributor.authorGromova, Maria
dc.contributor.authorVerbist, Agnes
dc.contributor.authorVan der Donck, Tom
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorCelis, Jean-Pierre
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T06:33:05Z
dc.date.available2021-10-17T06:33:05Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13528
dc.sourceIIOimport
dc.titleStacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Rita
dc.contributor.imecauthorDu Bois, Bert
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.orcidimecDu Bois, Bert::0000-0003-0147-1296
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.source.peerreviewyes
dc.source.beginpage1075-J05-02
dc.source.conferencePassive and Electromechanical Materials and Integration
dc.source.conferencedate24/03/2008
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttp://www.mrs.org/s_mrs/sec_subscribe.asp?CID=12438&DID=213870&action=detail
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1075E


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